Back to Search Start Over

(Invited) Preparation of Ordered Anodic Porous Alumina Through-Hole Membrane and Its Applications

Authors :
Takashi Yanagishita
Hideki Masuda
Source :
ECS Transactions. 75:21-26
Publication Year :
2016
Publisher :
The Electrochemical Society, 2016.

Abstract

Anodic porous alumina, which is a typical self-ordered nanohole array material formed by anodization of Al in an appropriate acid solution, has recently attracted increasing interest as a key material for the fabrication of functional devices1,2). For the various applications of ordered anodic porous alumina, the preparation of through-hole membranes is important. The fabrication process for porous alumina through-hole membranes has been investigated for a long time3). However, a facile and reliable process that does not require special techniques has not yet been established. To overcome this problem, we have been developing a new high-throughput process for fabricating through-hole alumina membranes4). This process is based on the new finding that through-hole membranes can be easily obtained by dissolving a two-layered sample in an appropriate etchant, which was formed by a first anodization under standard anodizing conditions and a subsequent anodization in concentrated H2SO4. This is because the oxide layer formed in the concentrated H2SO4 can be easily dissolved in an appropriate etchant. After the detachment of the membrane, the residual Al substrate could be repeatedly used for the preparation of ordered through-hole membranes. In this report, recent results of the preparation of ordered anodic porous alumina through-hole membranes and its applications will be presented. References 1) T. Yanagishita and T. Hidaka, M. Suzuki, and H. Masuda, J. Vac. Sci. Technol. B, 34, 021804 (2016). 2) H. Masuda and K. Fukuda, Science, 268, 1466 (1995). 3) H. Masuda and M. Satoh, Hpn. J. Appl/ Phys., 35, L126 (1996). 4) T. Yanagishita and H. Masuda, Electrochim. Acta, 184, 80 (2015).

Details

ISSN :
19386737 and 19385862
Volume :
75
Database :
OpenAIRE
Journal :
ECS Transactions
Accession number :
edsair.doi.dedup.....c8046665237727846382fa5d1fffedaa
Full Text :
https://doi.org/10.1149/07501.0021ecst