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Molecular dynamics simulation on the effect of dislocation structures on the retention and distribution of helium ions implanted into silicon
- Source :
- Nanotechnology and Precision Engineering, Vol 3, Iss 2, Pp 81-87 (2020)
- Publication Year :
- 2020
- Publisher :
- AIP Publishing LLC, 2020.
-
Abstract
- To investigate the effect of dislocation structures on the initial formation stage of helium bubbles, molecular dynamics (MD) simulations were used in this study. The retention rate and distribution of helium ions with 2 keV energy implanted into silicon with dislocation structures were studied via MD simulation. Results show that the dislocation structures and their positions in the sample affect the helium ion retention rate. The analysis on the three-dimensional distribution of helium ions show that the implanted helium ions tend to accumulate near the dislocation structures. Raman spectroscopy results show that the silicon substrate surface after helium ion implantation displayed tensile stress as indicated by the blue shift of Raman peaks.
- Subjects :
- inorganic chemicals
Silicon
Technology
Materials science
genetic structures
chemistry.chemical_element
02 engineering and technology
01 natural sciences
Molecular physics
Industrial and Manufacturing Engineering
Ion
Molecular dynamics
symbols.namesake
Molecular dynamics simulation
Physics::Atomic and Molecular Clusters
Dislocation
Physics::Atomic Physics
Instrumentation
Helium
Mechanical Engineering
010401 analytical chemistry
respiratory system
021001 nanoscience & nanotechnology
Engineering (General). Civil engineering (General)
0104 chemical sciences
Blueshift
respiratory tract diseases
Helium ion implantation
Ion implantation
chemistry
Raman spectroscopy
symbols
TA1-2040
0210 nano-technology
circulatory and respiratory physiology
Subjects
Details
- Language :
- English
- ISSN :
- 25895540
- Volume :
- 3
- Issue :
- 2
- Database :
- OpenAIRE
- Journal :
- Nanotechnology and Precision Engineering
- Accession number :
- edsair.doi.dedup.....ca55831b0d66b6648ee70fe0718b1a8f