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Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion
- Source :
- Conference on Lasers and Electro-Optics
- Publication Year :
- 2020
-
Abstract
- We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid X(2)-X(3) microresonators with Q " 106, as well as integrated travelling wave EO modulators.
- Subjects :
- Materials science
Fabrication
business.industry
Wafer bonding
Lithium niobate
Copper interconnect
silicon
Optical ring resonators
Insulator (electricity)
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
7. Clean energy
law.invention
010309 optics
chemistry.chemical_compound
chemistry
law
0103 physical sciences
Traveling wave
Optoelectronics
Photonics
0210 nano-technology
business
Subjects
Details
- ISBN :
- 978-1-943580-76-7
- ISBNs :
- 9781943580767
- Database :
- OpenAIRE
- Journal :
- Conference on Lasers and Electro-Optics
- Accession number :
- edsair.doi.dedup.....cec81826b1eb42217430d8b78649b9c1
- Full Text :
- https://doi.org/10.1364/cleo_si.2020.sth1f.3