XPS and μ-Raman study of nanosecond-laser processing of poly(dimethylsiloxane) (PDMS)

Data about the chemical status of poly(dimethylsiloxane) (PDMS) after nanosecond Q-switched Nd:YAG laser treatment with near infrared, visible and ultraviolet radiation are presented. The μ-Raman spectroscopy analyses reveal as irradiation result a new sharp peak of crystalline silicon. In addition, broad bands appear assigned to D band of amorphous carbon and G band of microcrystalline and polycrystalline graphite. The μ-Raman spectra are variable taken in different inspected points in the trenches formed by laser treatment. The XPS surface survey spectra indicate the constituent elements of PDMS: carbon, oxygen and silicon. The spectra of detail XPS scans illustrate the influence of the laser treatment. The position of Si 2p peaks of the treated samples is close to the value of non-treated except that irradiated by 1064 nm 66 pulses, which is shifted by 0.9 eV. Accordingly, a shift by 0.4 eV is noticed of the O 1s peak, which reflects again a stronger oxidation of silicon. The curve fitting of Si 2p and O 1s peaks after this particular laser treatment shows the degree of conversion of organic to inorganic silicon that takes place during the irradiation.