Back to Search
Start Over
Setup of a confocal nanoscope in reflection using a super-oscillatory lens
- Source :
- Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, Nanoengineering
- Publication Year :
- 2019
- Publisher :
- SPIE, 2019.
-
Abstract
- In this paper, we discuss the setup of a confocal nanoscope in reflection using a super-oscillatory lens (SOL)which offers a sub-diffracted focal spot with an ultra-short depth of focus (≈100 nm). A tolerance of 20 nm defocussing in a 10 μm travel range is thus necessary, translating to an alignment requirement of the stage, with respect to the optical axis, below 2 mrad. We discuss an iterative procedure to fine tune the stage movement to achieve this requirement. We also demonstrate the necessity of the alignment by imaging a 5μm long 1D array of rectangular shaped Au nanostructures with a periodicity of 500 nm.
- Subjects :
- Depth of focus
Super-oscillatory lens
Atomic de Broglie microscope
Materials science
business.industry
Confocal
nano-positioning
reection nanoscopy
reflection nanoscopy
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
law.invention
010309 optics
Optical axis
Lens (optics)
Optics
Reflection (mathematics)
law
0103 physical sciences
Focal spot
0210 nano-technology
business
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, Nanoengineering
- Accession number :
- edsair.doi.dedup.....d70e083faf99bdb67a66bdc2f12caea9