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Non-linear effects in high energy cluster ion implantation

Authors :
Takaaki Aoki
I. Yamada
D. Takeuchi
J. Matsuo
Source :
ResearcherID

Abstract

Cluster ion implantation realizes ultra-shallow (

Subjects

Subjects :
chemistry.chemical_compound
Ion implantation
Silicon
Physics::Plasma Physics
Chemistry
Decaborane
Atom
Cluster (physics)
Sapphire
chemistry.chemical_element
Substrate (electronics)
Atomic physics
Ion

Details

Database :
OpenAIRE
Journal :
ResearcherID
Accession number :
edsair.doi.dedup.....ddc6c52431272553ce96bcf626852a62

Tools

Authors Abstract Subjects Details