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A Closed-Loop System for Resonant MEMS Sensors Subject to Blue-Sideband Excitation

Authors :
Lei Xu
Jingqian Xi
Lu Gao
Fangzheng Li
Jianyuan Pi
Chengxin Li
Kunfeng Wang
Xingyin Xiong
Yuan Wang
Huafeng Liu
Xudong Zou
Chun Zhao
Source :
Journal of Microelectromechanical Systems. 31:690-699
Publication Year :
2022
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2022.

Subjects

Subjects :
Mechanical Engineering
Electrical and Electronic Engineering

Details

ISSN :
19410158 and 10577157
Volume :
31
Database :
OpenAIRE
Journal :
Journal of Microelectromechanical Systems
Accession number :
edsair.doi.dedup.....de4ffdd87056fdfd84110f7a86f4dae5

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