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Synthesis of Large-Area MoS2Atomic Layers with Chemical Vapor Deposition
- Source :
- Advanced Materials. 24:2320-2325
- Publication Year :
- 2012
- Publisher :
- Wiley, 2012.
-
Abstract
- Large-area MoS2 atomic layers are synthesized on SiO2 substrates by chemical vapor deposition using MoO3 and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS2 monolayer. The TEM images verify that the synthesized MoS2 sheets are highly crystalline.<br />Comment: First submitted on 12-Dec-2011. Accepted in Adv. Mater
- Subjects :
- Molybdenum
Condensed Matter - Materials Science
Materials science
Hybrid physical-chemical vapor deposition
Mechanical Engineering
Ion plating
Inorganic chemistry
Materials Science (cond-mat.mtrl-sci)
FOS: Physical sciences
Oxides
Chemical vapor deposition
Combustion chemical vapor deposition
Silicon Dioxide
Electron beam physical vapor deposition
Nanostructures
chemistry.chemical_compound
Chemical engineering
chemistry
Mechanics of Materials
Monolayer
General Materials Science
Electrical measurements
Disulfides
Gases
Molybdenum disulfide
Subjects
Details
- ISSN :
- 09359648
- Volume :
- 24
- Database :
- OpenAIRE
- Journal :
- Advanced Materials
- Accession number :
- edsair.doi.dedup.....df5ee81b210508c1c0f8648e45bbd597
- Full Text :
- https://doi.org/10.1002/adma.201104798