In-situ Thermal Stress Measurement in Multi-layered Aluminum Nitride and Copper Films by Synchrotron Radiation

Subjects

Subjects :

In situ
Materials science
chemistry
Mechanics of Materials
Aluminium
Mechanical Engineering
Metallurgy
chemistry.chemical_element
Synchrotron radiation
General Materials Science
Nitride
Copper

Details

ISSN :

18848338 and 03875008

Volume :

74

Database :

OpenAIRE

Journal :

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A

Accession number :

edsair.doi.dedup.....e6d05d62b66cb82992098db6d3390108

Full Text :

https://doi.org/10.1299/kikaia.74.363