A terahertz quantum cascade. laser grown by low-pressure metalorganic vapor phase epitaxy

Demonstration of a terahertz quantum cascade laser grown by a low-pressure metalorganic vapor phase epitaxy is reported. The structural analysis of the grown structure shows a very high degree of vertical uniformity and sharp interfaces. Lasing emission at λ=90μm up to 93K with a threshold current density Jth=330A∕cm2 at 7K was obtained in a structure incorporating a single plasmon waveguide.