Fabrication of ideally ordered anodic porous TiO 2 by anodization of pretextured two-layered metals

Ideally ordered anodic porous TiO2 was fabricated by anodizing an Al/Ti layered specimen. A two-layered specimen composed of an Al top layer and a Ti underlying layer was prepared and then processed by nanoimprinting. The Al top layer was easily pretextured by nanoimprinting owing to its softness and it was straightforward to introduce an ideally ordered pore arrangement by anodization. This pore arrangement was transferred to the underlying Ti layer, resulting in ideally ordered porous structures in TiO2. This process can be applied to the high-throughput fabrication of ideally ordered anodic porous oxides other than TiO2 and also to other metals with high hardness. Keywords: Porous TiO2, Anodization, Imprinting process