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A comparative study of via drilling and scribing on PEN and PET substrates for flexible electronic applications using excimer and Nd:YAG laser sources
- Source :
- Flexible Electronics and Displays Conference and Exhibition, FLEX 2009, 2 February 2009 through 2 February 2009
- Publication Year :
- 2009
- Publisher :
- IEEE, 2009.
-
Abstract
- A study on via drilling and channel scribing on PEN and PET substrates for flexible electronic application is discussed in this paper. For the experiments, both KIF excimer laser (248 nm) and frequency tripled Nd:YAG (355 nm) laser are used. Different measurement techniques like optical microscopy, Dektak profilometer, Confocal microscopy and scanning electron microscopy (SEM) were employed to characterize the quality of the channels and vias. The patterned structures were filled by three different methods using a conductive paste or ink that is cured in an oven at an elevated temperature. The cross-sectional measurements of channels and vias were carried out using SEM to study the uniformity of filling.
- Subjects :
- Materials science
medicine.medical_treatment
Nd: YAG
Laser
Photoablation
Ablation
Optical microscopy
law.invention
YAG lasers [ND]
YAG [Nd]
Optics
law
Channels
ND : YAG lasers
Profilometers
Gas lasers
Microscopy
medicine
PET substrate
Via drilling
Elevated temperature
Flexible electronics
Neodymium
Filling
Laser ablation
Excimers
Substrates
Excimer laser
business.industry
Comparative studies
Confocal microscopy
Vias
Measurement techniques
Nd:YAG laser
Patterned structure
SEM
Optoelectronics
Profilometer
Electronics
Conductive pastes
business
Scanning electron microscopy
Neodymium lasers
Excimer lasers
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2009 Flexible Electronics & Displays Conference and Exhibition
- Accession number :
- edsair.doi.dedup.....eacb843d69feac85285fc06433c79514