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Investigation of Ion Channeling and Scattering for Single‐Ion Implantation with High Spatial Resolution
- Source :
- physica status solidi (a)
- Publication Year :
- 2019
- Publisher :
- Wiley, 2019.
- Subjects :
- Materials science
Single ion
Scattering
02 engineering and technology
Surfaces and Interfaces
021001 nanoscience & nanotechnology
Condensed Matter Physics
Molecular physics
01 natural sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Ion channeling
0103 physical sciences
High spatial resolution
Materials Chemistry
Electrical and Electronic Engineering
010306 general physics
0210 nano-technology
Subjects
Details
- ISSN :
- 18626319 and 18626300
- Volume :
- 216
- Database :
- OpenAIRE
- Journal :
- physica status solidi (a)
- Accession number :
- edsair.doi.dedup.....eb5ad9c510753c95c409d8503d0135f7
- Full Text :
- https://doi.org/10.1002/pssa.201900528