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Ruthenium Electrodeposition from Deep Eutectic Solvents
- Source :
- Journal of The Electrochemical Society. 165:D620-D627
- Publication Year :
- 2018
- Publisher :
- The Electrochemical Society, 2018.
- Subjects :
- Materials science
interconnects
Renewable Energy, Sustainability and the Environment
020209 energy
chemistry.chemical_element
02 engineering and technology
021001 nanoscience & nanotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Ruthenium
Electrodeposition
chemistry
Chemical engineering
microelectronics
0202 electrical engineering, electronic engineering, information engineering
Materials Chemistry
Electrochemistry
0210 nano-technology
Electrodeposition, interconnects, microelectronics
Eutectic system
Subjects
Details
- ISSN :
- 19457111 and 00134651
- Volume :
- 165
- Database :
- OpenAIRE
- Journal :
- Journal of The Electrochemical Society
- Accession number :
- edsair.doi.dedup.....f042e341c76e85fba99be278c57172ea
- Full Text :
- https://doi.org/10.1149/2.0541813jes