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Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers
- Source :
- Applied Physics Letters. 111:013501
- Publication Year :
- 2017
- Publisher :
- AIP Publishing, 2017.
-
Abstract
- We systematically demonstrate that one-dimensional phononic crystal (1-D PnC) tethers can significantly reduce tether loss in micromechanical resonators to a point where the total energy loss is dominated by intrinsic mechanisms, particularly phonon damping. Multiple silicon resonators are designed, fabricated, and tested to provide comparisons in terms of the number of periods in the PnC and the resonance frequency, as well as a comparison with conventional straight-beam tethers. The product of resonance frequency and measured quality factor (f×Q) is the critical figure of merit, as it is inversely related to the total energy dissipation in a resonator. For a wide range of frequencies, devices with PnC tethers consistently demonstrate higher f×Q values than the best conventional straight-beam tether designs. The f×Q product improves with increasing number of PnC periods, and at a maximum value of 1.2 × 1013 Hz, approaches limiting values set by intrinsic material loss mechanisms.
- Subjects :
- 010302 applied physics
Range (particle radiation)
Materials science
Physics and Astronomy (miscellaneous)
Silicon
business.industry
Phonon
chemistry.chemical_element
02 engineering and technology
Dissipation
021001 nanoscience & nanotechnology
01 natural sciences
Article
Crystal
Resonator
Quality (physics)
chemistry
0103 physical sciences
Optoelectronics
Figure of merit
0210 nano-technology
business
Subjects
Details
- ISSN :
- 10773118 and 00036951
- Volume :
- 111
- Database :
- OpenAIRE
- Journal :
- Applied Physics Letters
- Accession number :
- edsair.doi.dedup.....f4f1cc69b8ca3f8c2a22220c4dfc8aa1