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Materials Engineering for Chemical Sensing Enhancement

Authors :
Kaur, N.
Zappa, D.
Comini, E.
Source :
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publication Year :
2023
Publisher :
IEEE, 2023.

Subjects

Subjects :
Metal oxide
chemical/gas sensor
heterostructures
nanowire
nickel oxide
tungsten oxide
zinc oxide

Details

Database :
OpenAIRE
Journal :
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Accession number :
edsair.doi.dedup.....f56366d2aa501aa59f4e72a888764cc6
Full Text :
https://doi.org/10.1109/mems49605.2023.10052498
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