50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection

MLA

Luis Guillermo Villanueva, et al. “50 Nm Thick AlN Film-Based Piezoelectric Cantilevers for Gravimetric Detection.” Journal of Micromechanics and Microengineering, vol. 21, July 2011, p. 085023. EBSCOhost, https://doi.org/10.1088/0960-1317/21/8/085023.

APA

Luis Guillermo Villanueva, Matthew H. Matheny, J. Abergel, P. Ivaldi, P. Andreucci, Michael L. Roukes, Emmanuel Defay, R. B. Karabalin, & Sebastien Hentz. (2011). 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection. Journal of Micromechanics and Microengineering, 21, 085023. https://doi.org/10.1088/0960-1317/21/8/085023

Chicago

Luis Guillermo Villanueva, Matthew H. Matheny, J. Abergel, P. Ivaldi, P. Andreucci, Michael L. Roukes, Emmanuel Defay, R. B. Karabalin, and Sebastien Hentz. 2011. “50 Nm Thick AlN Film-Based Piezoelectric Cantilevers for Gravimetric Detection.” Journal of Micromechanics and Microengineering 21 (July): 085023. doi:10.1088/0960-1317/21/8/085023.