Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

MLA

Máté Vass, et al. Electron Power Absorption in Low Pressure Capacitively Coupled Electronegative Oxygen Radio Frequency Plasmas. Jan. 2019. EBSCOhost, https://doi.org/10.48550/arxiv.1911.02435.

APA

Máté Vass, Julian Schulze, Zoltan Donko, Ralf Peter Brinkmann, Sebastian Wilczek, & Trevor Lafleur. (2019). Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas. https://doi.org/10.48550/arxiv.1911.02435

Chicago

Máté Vass, Julian Schulze, Zoltan Donko, Ralf Peter Brinkmann, Sebastian Wilczek, and Trevor Lafleur. 2019. “Electron Power Absorption in Low Pressure Capacitively Coupled Electronegative Oxygen Radio Frequency Plasmas,” January. doi:10.48550/arxiv.1911.02435.