Fabrication and Characterization of Topology-Optimized Photonic Cavities with Deep Subwavelength Confinement

Authors :: Søren Stobbe
Jesper Mørk
Henri Jansen
Vy Thi Hoang Nguyen
Marcus Albrechtsen
Ole Sigmund
Rasmus E. Christiansen
B. Vosoughi Lahijani
Source :: Technical University of Denmark Orbit
Abstract: We design, fabricate, and characterize an ultracompact (2) photonic nanocavity in silicon with a deep subwavelength mode volume, which enables strongly enhanced light-matter interaction for applications in nanolasers and nonlinear nanophotonics.

Subjects :: Mode volume
Fabrication
Materials science
Silicon
business.industry
Nanophotonics
chemistry.chemical_element
Fano resonance
chemistry
Optoelectronics
Photonics
business
Topology (chemistry)
Electron-beam lithography

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