Materials selection for low temperature processed high Q resonators using ashby approach

MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.