Influence of interfacial layer on contact resistance

The contact resistance between two materials is dependent on the intrinsic properties of the materials in contact and the presence and properties of an interfacial layer at the contact. This article presents the difference in contact resistance measurements with and without the presence of a process limiting interfacial layer. These measurements are performed using Cross Bridge Kelvin Resistor (CBKR) test structures on TiW- Phase Change Material (PCM) contacts.