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Proposal of a MEMS-based Cooling System Using an ECF Micropump
- Source :
- International Symposium on PRecision Engineering and Sustainable Manufacturing (PRESM2019) Program&Proceedings.
- Publication Year :
- 2019
- Subjects :
- ECF micropump, Liquid cooling, MEMS fabrication, Thermal management
Subjects
Details
- Language :
- English
- ISSN :
- 26357887
- Database :
- OpenAIRE
- Journal :
- International Symposium on PRecision Engineering and Sustainable Manufacturing (PRESM2019) Program&Proceedings
- Accession number :
- edsair.jairo.........39054ec818ac55e4e4c78bede25756f1