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Low Temperature Sputter-Deposition of ZnO on Polymers by the Scanning Plasma Method
- Source :
- 長崎大学工学部研究報告. 33(61):53-56
- Publication Year :
- 2003
-
Abstract
- ZnO thin films were prepared on polyethylene terephthalate (PET) substrates using the scanning plasma method. We investigate the dependence of the scanning frequency and magnetic flux density on the substrate temperatures. We found the substrate was kept at low temperatures by modulating magnetic field and magnetic field frequency.<br />長崎大学工学部研究報告 Vol.33(61) p. 53-56, 2003
Details
- Language :
- Japanese
- ISSN :
- 02860902
- Volume :
- 33
- Issue :
- 61
- Database :
- OpenAIRE
- Journal :
- 長崎大学工学部研究報告
- Accession number :
- edsair.jairo.........65a53e6fec78508ce1d1e0c238445bf6