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Low Temperature Sputter-Deposition of ZnO on Polymers by the Scanning Plasma Method

Source :
長崎大学工学部研究報告. 33(61):53-56
Publication Year :
2003

Abstract

ZnO thin films were prepared on polyethylene terephthalate (PET) substrates using the scanning plasma method. We investigate the dependence of the scanning frequency and magnetic flux density on the substrate temperatures. We found the substrate was kept at low temperatures by modulating magnetic field and magnetic field frequency.<br />長崎大学工学部研究報告 Vol.33(61) p. 53-56, 2003

Details

Language :
Japanese
ISSN :
02860902
Volume :
33
Issue :
61
Database :
OpenAIRE
Journal :
長崎大学工学部研究報告
Accession number :
edsair.jairo.........65a53e6fec78508ce1d1e0c238445bf6