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LELECUT Triple Patterning Lithography Layout Decomposition using Positive Semidefinite Relaxation

Authors :
Kohira, Yukihide
Matsui, Tomomi
TAKAHASHI, Atsushi
Source :
電子情報通信学会技術研究報告 (VLD2014-6). 114(No. 59):27-32
Publication Year :
2014

Details

Language :
Japanese
Volume :
114
Issue :
No. 59
Database :
OpenAIRE
Journal :
電子情報通信学会技術研究報告 (VLD2014-6)
Accession number :
edsair.jairo.........6a7f1c2fc3ad49db35685e796fad2397

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