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Epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface
Details
- Language :
- English
- ISSN :
- 00319007
- Volume :
- 98
- Database :
- OpenAIRE
- Journal :
- Phys. Rev. Lett.
- Accession number :
- edsair.jairo.........a8b1accef96c8b52044f8a8522f6acde