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Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer

Authors :
Miyai, Ryosuke
Kurioka, Tomoyuki
Chen, Chun Yi
Chang, Tso-Fu Mark
Onishi, Akira
CHAKRABORTY, P
CHAKRABORTY, Parthojit
Machida, Katsuyuki
Ito, Hiroyuki
Miyake, Yoshihiro
Sone, Masato
Source :
49th international conference on Micro and Nano Engineering (MNE2023).
Publication Year :
2023

Details

Language :
English
Database :
OpenAIRE
Journal :
49th international conference on Micro and Nano Engineering (MNE2023)
Accession number :
edsair.jairo.........b16dc9c0352f26f2e7ea12aa386e9d09

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