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Development of shower head type multi-gas plasma source for large area atmospheric plasma CVD

Authors :
Noguchi, Tsuyoshi
Yamazaki, Kenichi
Suenaga, Yuma
Yasui, Hiroyuki
Suematsu, Hinako
OKINO, AKITOSHI
Publication Year :
2021

Details

Language :
Japanese
Database :
OpenAIRE
Accession number :
edsair.jairo.........b8bed27d5034b0ecfc8d5af145bffb24

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