Back to Search Start Over

ArF scanner lithography for InP photonic integrated circuit fabrication

Authors :
Bolk, Jeroen
Williams, Kevin A.
Ambrosius, Huub P.M.M.
NanoLab@TU/e
Photonic Integration
Publication Year :
2020
Publisher :
Technische Universiteit Eindhoven, 2020.

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.narcis........7494d8544fb8f096d2dca7adde47a91e

Tools

Authors Abstract Subjects Details