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Low thermal budget technology for poly-(Ge)Si thin film transistors

Authors :
Rem, J.B.
Verweij, J.F.
Holleman, Jisk
Publication Year :
1997
Publisher :
University of Twente, 1997.

Subjects

Subjects :
METIS-111445

Details

Database :
OpenAIRE
Accession number :
edsair.narcis........8dd821d1bd109f355f642c64be278b31

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Authors Abstract Subjects Details