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In situ core level and valence band photoelectron spectroscopy of reactively sputtered titanium aluminum nitride films

Authors :
Schueler, Andreas
Oelhafen, Peter
Francz, G.
Zehnder, T.
Düggelin, M.
Mathys, D.
Guggenheim, R.

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Database :
OpenAIRE
Accession number :
edsair.od.......185..a605568b42e144e7ad8bc1303826f764

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