Introduction of a high quality nanofilm of aluminum oxide enhances the performance of EWOD microfluidic platforms

Electrowetting on dielectric (EWOD) is a promising technology for the construction of lab-on-chip devices which allows to perform on chip manipulation of pL-uL droplets with the use of applied electric fields. EWOD chips actuated with low voltages are preferred for the use with living cells, however, the microfabrication of those remains a challenge. Here, we propose the addition of a high quality 13 nm thick nanofilm of aluminum (III) oxide (II) to enhance the range of operational voltages of four EWOD dielectric stacks. Our ultimate goal is the development of a transparent microchip for a dynamic in vitro cell culture.