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Antiresonant reflecting optical waveguides in strip configuration

Authors :
Gehler, J.
Bräuer, A.
Karthe, W.
Publica
Publication Year :
1994

Abstract

A monomode antiresonant reflecting optical strip waveguide has been realized in SiON/SiO2/Si. The lateral confinement is provided by strip-loaded reflectors fabricated by e-beam direct writing and reactive ion beam etching (RIBE).

Subjects

Subjects :
Elektronenstrahllithographie
siliconoxinitrid
integrated optic
Siliziumoxinitrid
e-beam
arrow
RIBE
integrierte Optik

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od.......610..cf42113dc771ed3a3e7da334b812601b

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