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Arsenic implanted polysilicon layers

Authors :
Ryssel, H.
Bleier, M.
Prinke, G.
Haberger, K.
Kranz, H.
Iberl, F.
Publica
Publication Year :
1981

Subjects

Subjects :
Schicht
Arsen
implantation
Polysilizium
Silizium

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od.......610..facd430ddf418b51cccaa7a1a0e25b4f

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Authors Abstract Subjects Details