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300mm wafer level WS2 p-MOS capacitor Characterization, Simulation, and Analysis

Authors :
Koladi Mootheri, Vivek
Okuyama, Atsushi
Gaur, Abhinav
Smets, Quentin
Schram, Tom
Asselberghs, Inge
Heyns, Marc
Radu, Iuliana
Lin, Dennis
Publication Year :
2020

Abstract

ispartof: no ispartof: 51st Silicon Interface Specialist Conference location:online status: accepted

Details

Database :
OpenAIRE
Accession number :
edsair.od......1131..d1bb906df827f6d1507e20425a2840de