Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5.:High Precision Micro Production Technologies - Collaborative project - Small or medium-scale focused research. 1.10.2012 – 30.9.2015

Authors :: Quagliotti, Danilo
Tosello, Guido
Agour, M.
Flosky, C.
Meier, A.
Riemer, O.
Dormann, B.
Source :: Quagliotti, D, Tosello, G, Agour, M, Flosky, C, Meier, A, Riemer, O & Dormann, B 2015, Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5. High Precision Micro Production Technologies-Collaborative project-Small or medium-scale focused research. 1.10.2012 – 30.9.2015 . Hi-Micro project .
Publication Year :: 2015
Publisher :: Hi-Micro project, 2015.

Language :: English
Database :: OpenAIRE
Journal :: Quagliotti, D, Tosello, G, Agour, M, Flosky, C, Meier, A, Riemer, O & Dormann, B 2015, Calibration and Metrology for Micro/Nano Dimensional Quality Control. D3.5. High Precision Micro Production Technologies-Collaborative project-Small or medium-scale focused research. 1.10.2012 – 30.9.2015 . Hi-Micro project .
Accession number :: edsair.od......1202..0c767f3de78b13448afae8ada776b5d5

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