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Comparison among various Si3N4 waveguide geometries grown within a CMOS fabrication pilot line

Authors :
Daldosso, Nicola
Melchiorri, M.
Riboli, F.
Girardini, M.
Pucker, G.
Crivellari, M.
Bellutti, P.
Lui, A.
Pavesi, L.
Publication Year :
2004

Subjects

Subjects :
silicon-integrated photonics
optical propagation losses
silicon nitride
CMOS-compatible technology
optical mode analysis
Waveguides

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od......1943..f18eb35559f867206bddcb8f650f80a6

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Authors Abstract Subjects Details