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Microtechnologies
- Publication Year :
- 2012
- Publisher :
- VGTU leidykla „Technika“, 2012.
-
Abstract
- The book describes theoretical and practical works of key technology issues for microelectronic fabrication and introduces the technology computer-aided design (TCAD) simulation tools to the reader. Examples of computer simulations provide a technically accurate introduction to advanced semiconductor manufacturing technologies: epitaxial growth, thermal oxidation, thermal diffusion and ion implantation, photolithography, etch, metallization. This publication has been produced with the financial assistance of Europe Social Fund and VGTU (Project No VP1-2.2-ŠMM-07-K-01-047). The book is a part of the project “The Essential Renewal of Undergraduates Study Programs of VGTU Electronics Faculty”.
Details
- Language :
- Chinese
- Database :
- OpenAIRE
- Accession number :
- edsair.od......2495..f4a76dac9f2830d4bcaa84e188a9dbb2