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HfO2 and ZrO2 based functional sol-gel resists for selective immobilization of biomolecules on patterned surfaces integrated in microfluidic devices
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.od......3657..0e8c4674b2296b4cfbdff7986ccef4dd