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Quantitative strain mapping in nano electronic silicon dvices by convergent beam electron diffraction

Authors :
Armigliato, A.
Balboni, R.
Frabboni, Stefano
Spessot, A.
Publication Year :
2008
Publisher :
Research Signpost, 2008.

Subjects

Subjects :
strain mapping nanoelectronic devices

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od......3674..0aafdc7db436c9575ea6ae15d35c2623

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Authors Abstract Subjects Details