STRUCTURAL AND ANALYTICAL CHARACTERIZATION OF SI(1-X)GEX/SI HETEROSTRUCTURES BY RUTHERFORD BACKSCATTERING SPECTROMETRY AND CHANNELING, ANALYTICAL ELECTRON-MICROSCOPY AND DOUBLE CRYSTAL X-RAY-DIFFRACTOMETRY

Subjects

Subjects :

convergent beam electron diffraction
strain measurements
SILICON-GERMANIUM ALLOYS

Details

Language :

English

Database :

OpenAIRE

Accession number :

edsair.od......3674..98932a663ea610eacb19c6384c9c3268