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Wafer-scale transferred multilayer MoS
- Source :
- Nanotechnology. 30(17)
- Publication Year :
- 2019
-
Abstract
- Chemical vapor deposition synthesis of semiconducting transition metal dichalcogenides (TMDs) offers a new route to build next-generation semiconductor devices. But realization of continuous and uniform multilayer (ML) TMD films is still limited by their specific growth kinetics, such as the competition between surface and interfacial energy. In this work, a layer-by-layer vacuum stacking transfer method is applied to obtain uniform and non-destructive ML-MoS
Details
- ISSN :
- 13616528
- Volume :
- 30
- Issue :
- 17
- Database :
- OpenAIRE
- Journal :
- Nanotechnology
- Accession number :
- edsair.pmid..........16199fac219e3d2bb0bf1e51893252fb