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Wafer-scale transferred multilayer MoS

Authors :
Simeng, Zhang
Hu, Xu
Fuyou, Liao
Yangye, Sun
Kun, Ba
Zhengzong, Sun
Zhi-Jun, Qiu
Zihan, Xu
Hao, Zhu
Lin, Chen
Qingqing, Sun
Peng, Zhou
Wenzhong, Bao
David Wei, Zhang
Source :
Nanotechnology. 30(17)
Publication Year :
2019

Abstract

Chemical vapor deposition synthesis of semiconducting transition metal dichalcogenides (TMDs) offers a new route to build next-generation semiconductor devices. But realization of continuous and uniform multilayer (ML) TMD films is still limited by their specific growth kinetics, such as the competition between surface and interfacial energy. In this work, a layer-by-layer vacuum stacking transfer method is applied to obtain uniform and non-destructive ML-MoS

Details

ISSN :
13616528
Volume :
30
Issue :
17
Database :
OpenAIRE
Journal :
Nanotechnology
Accession number :
edsair.pmid..........16199fac219e3d2bb0bf1e51893252fb