Effective photoluminescence in a large-area array of Ta2O5 nanodots

We describe here the synthesis of a large-area Ta2O5 nanodot array by utilizing the hot filament metal vapor deposition technique. The Ta2O5 nanodots arranged in a large-area array on a Si wafer had an average diameter of -8 nm. X-ray photoemission spectroscopy (XPS) revealed the stoichiometric Ta and O compositions of the Ta2O5 nanodots. Raman spectroscopy showed the Ta2O5 nanodots to be of orthorhombic (beta) crystal. Photoluminescence (PL) spectroscopy showed the green and red light emissions of the beta-Ta2O5 nanodots at room temperature.