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Titanium Nitride Films for Ultrasensitive Microresonator Detectors
- Publication Year :
- 2010
-
Abstract
- Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, \rho_n ~ 100 $\mu$Ohm cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Q_i > 10^7) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10-200 $\mu$s. TiN microresonators should therefore reach sensitivities well below 10^-19 WHz^(-1/2).<br />Comment: to be published in APL
- Subjects :
- Condensed Matter - Superconductivity
Physics - Instrumentation and Detectors
Subjects
Details
- Database :
- arXiv
- Publication Type :
- Report
- Accession number :
- edsarx.1003.5584
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1063/1.3480420