Aluminum Hard Mask Technique for the Fabrication of High-Quality Submicron Nb/Al-AlOx/Nb Josephson Junctions

MLA

Kaiser, Christoph, et al. Aluminum Hard Mask Technique for the Fabrication of High-Quality Submicron Nb/Al-AlOx/Nb Josephson Junctions. 2010. EBSCOhost, https://doi.org/10.1088/0953-2048/24/3/035005.

APA

Kaiser, C., Meckbach, J. M., Ilin, K., Lisenfeld, J., Schäfer, R., Ustinov, A. V., & Siegel, M. (2010). Aluminum Hard Mask Technique for the Fabrication of High-Quality Submicron Nb/Al-AlOx/Nb Josephson Junctions. https://doi.org/10.1088/0953-2048/24/3/035005

Chicago

Kaiser, Christoph, J. M. Meckbach, K. Ilin, J. Lisenfeld, R. Schäfer, A. V. Ustinov, and M. Siegel. 2010. “Aluminum Hard Mask Technique for the Fabrication of High-Quality Submicron Nb/Al-AlOx/Nb Josephson Junctions.” doi:10.1088/0953-2048/24/3/035005.