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Quantum Electromechanics on Silicon Nitride Nanomembranes
- Publication Year :
- 2015
-
Abstract
- We present a platform based upon silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Utilizing tensile stress and lithographic patterning of a silicon nitride nanomembrane we are able to reliably realize planar capacitors with vacuum gap sizes down to $s \approx 80$nm. In combination with spiral inductor coils of micron pitch, this yields microwave ($\approx 8$GHz) resonant circuits of high impedance ($Z_{0} \approx 3.4$k$\Omega$) suitable for efficient electromechanical coupling to nanoscale acoustic structures. We measure an electromechanical vacuum coupling rate of $g_{0}/2\pi = 41.5$~Hz to the low frequency ($4.48$MHz) global beam motion of a patterned phononic crystal nanobeam, and through parametric microwave driving reach a backaction cooled mechanical mode occupancy as low as $n_{m} = 0.58$.<br />Comment: 21 pages, 9 figures
- Subjects :
- Condensed Matter - Mesoscale and Nanoscale Physics
Quantum Physics
Subjects
Details
- Database :
- arXiv
- Publication Type :
- Report
- Accession number :
- edsarx.1512.04660
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1038/ncomms12396