High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.
Comment: 37 pages, 20 figures