Electron Spin Resonance at the Level of 10000 Spins Using Low Impedance Superconducting Resonators

We report on electron spin resonance (ESR) measurements of phosphorus donors localized in a 200 square micron area below the inductive wire of a lumped element superconducting resonator. By combining quantum limited parametric amplification with a low impedance microwave resonator design we are able to detect around 20000 spins with a signal-to-noise ratio (SNR) of 1 in a single shot. The 150 Hz coupling strength between the resonator field and individual spins is significantly larger than the 1 - 10 Hz coupling rates obtained with typical coplanar waveguide resonator designs. Due to the larger coupling rate, we find that spin relaxation is dominated by radiative decay into the resonator and dependent upon the spin-resonator detuning, as predicted by Purcell.