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MultiSIMNRA: a computational tool for self-consistent ion beam analysis using SIMNRA
- Source :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 371, 2016, Pages 86-89, ISSN 0168-583X
- Publication Year :
- 2018
-
Abstract
- SIMNRA is widely adopted by the scientific community of ion beam analysis for interpretation of nuclear scattering analysis. Taking advantage of its recognized reliability and quality of the simulations, we developed a computer program that use parallel sessions of SIMNRA to perform self-consistent analysis for energy spectra of a given sample obtained using different techniques or experimental setups. In this paper, we present a result using MultiSIMNRA on self-consistent analysis for a multielemental thin film produced by magnetron sputtering. The results demonstrate the potentialities of the self-consistent analysis and its feasibility when using MultiSIMNRA.<br />Comment: Part of special issue: The 22nd International Conference on Ion Beam Analysis (IBA 2015)
- Subjects :
- Physics - Instrumentation and Detectors
Nuclear Experiment
Subjects
Details
- Database :
- arXiv
- Journal :
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Volume 371, 2016, Pages 86-89, ISSN 0168-583X
- Publication Type :
- Report
- Accession number :
- edsarx.1803.01946
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1016/j.nimb.2015.10.038