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Line-field Coherent Sensing with LED Illumination
- Publication Year :
- 2022
-
Abstract
- We describe a method of low-coherence interferometry based optical profilometry using standard light-emitting diode (LED) illumination and complementary metal-oxide-semiconductor (CMOS) image sensors. A line-field illumination strategy allows for the simultaneous measurement of many points in space. Micron scale accuracy and resolution are achieved and demonstrated using a variety of targets.
- Subjects :
- Physics - Optics
Physics - Instrumentation and Detectors
Subjects
Details
- Database :
- arXiv
- Publication Type :
- Report
- Accession number :
- edsarx.2202.12161
- Document Type :
- Working Paper