Back to Search
Start Over
Crystallization of piezoceramic films on glass via flash lamp annealing
- Publication Year :
- 2023
-
Abstract
- Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 {\deg}C) is incompatible with most glasses. We developed a flash lamp process for growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. Functional properties of these films are comparable to the films processed with standard rapid thermal annealing at 700 {\deg}C. A surface haptic device was fabricated with a 1 $\unicode{x00B5}$m-thick film (piezoelectric e$_{33,f}$ of -5 C m$^{-2}$). Its ultrasonic surface deflection reached 1.5 $\unicode{x00B5}$m at 60 V, sufficient for its use in surface rendering applications. This flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and has the potential to significantly expand the applications of piezoelectric devices on glass.<br />Comment: 53 pages, 18 figures
- Subjects :
- Physics - Applied Physics
Condensed Matter - Materials Science
Subjects
Details
- Database :
- arXiv
- Publication Type :
- Report
- Accession number :
- edsarx.2303.13103
- Document Type :
- Working Paper